Building Updates
Phase I
4/08/24 Update
Equipment Updates
EQUIPMENT LIST | ORDERED | IN FACILITY | COMMISSIONED | OPERABLE |
---|---|---|---|---|
Novellus C1 PECVD | ||||
Expertech CTR-200 LPCVD [Si] | ✓ | ✓ | ||
Expertech CTR-200 LPCVD [Oxide] | ✓ | ✓ | ||
Expertech CTR-200 [N2 Anneal] | ✓ | ✓ | ||
Expertech CTR-200 [POCl3] | ✓ | ✓ | ||
Lam 590 RIE [Si] | ✓ | ✓ | ||
Lam 490 RIE [Oxide] | ✓ | ✓ | ||
Kurt J. Lesker PVD 200 | ||||
Onto Innovation Inspectrology IVS200 | ✓ | ✓ | ||
Woollam RC2XF Elipsometer | ✓ | ✓ | ||
Matrix Model 106 Asher | ✓ | ✓ | ||
Nikon iLine NSR 2005i8 Stepper | ✓ | ✓ | ||
Obducat MC204 Coater/Developer | ✓ | ✓ | ||
Obducat MC204 Wet Cleaner | ✓ | ✓ | ||
Centrotherm c.ACTIVATOR 150-50 | ✓ | ✓ | ||
Centrotherm c.OXIDATOR 150-50 | ✓ | ✓ |
Phase II
4/15/24 Update
Steel Erection Substantially Complete
Structural Steel Detailing Started
Exterior Framing Procurement Released
4/08/24 Update